专利名称：GROUP 8-CONTAINING FILM FORMING
COMPOSITIONS, THEIR SYNTHESIS, ANDUSE IN FILM DEPOSITION
发明人：Grigory Nikiforov,Satoko Gatineau申请号：US14986334申请日：20151231
公开号：US20160115586A1公开日：20160428
专利附图：
摘要：Group 8-containing film forming compositions, their preparation, and their usefor the vapor deposition of films are disclosed. The Group 8-containing film forming
compositions comprise silylamide-containing precursors, particularly {Fe[N(SiMe)]}.
申请人：L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation Des ProcédésGeorges Claude
地址：Paris FR
国籍：FR
更多信息请下载全文后查看
因篇幅问题不能全部显示，请点此查看更多更全内容