专利名称：Programmable micromirror motion control
system
发明人：Cheong Soo Seo,Gyoung Il Cho申请号：US11369797申请日：20060306公开号：US07474454B2公开日：20090106
专利附图：
摘要：A multi-motion programmable micromirror control method is provided with themultiple supports in a stepper plate to upholding the micromirror structure. The controlsystem has advantages such that multiple motion can be applied to a micromirror and
that the micromirror can be controlled in a low driving voltage and that simple motioncontrol is applied by digital controlling and that the degrees of freedom in motion of themicromirror can be chosen by the number of the stepper plate and that only singlevoltage is needed for driving the micromirror motion. With many advantages, the multi-motion programmable micromirror control system provides a solution to overcome thedifficulties in controlling micromirror motion.
申请人：Cheong Soo Seo,Gyoung Il Cho
地址：Seongnam KR,Seoul KR
国籍：KR,KR
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