专利名称:Polymer film and method for producing the
same
发明人:Nobutaka Kunimi,Jun Kawahara,Akinori
Nakano,Keizo Kinoshita
申请号:US11186856申请日:20050722
公开号:US20060052560A1公开日:20060309
专利附图:
摘要:A copolymer film having a decreased dielectric constant which is produced bysupplying at least two organic monomers as raw materials, forming a film of a copolymer
comprising a backbone based on said at least two monomers on a surface of a substrate,and heating the copolymer film at a temperature higher than a temperature at which thecopolymer film is formed.
申请人:Nobutaka Kunimi,Jun Kawahara,Akinori Nakano,Keizo Kinoshita
地址:Tsukuba-shi JP,Tokyo JP,Tokyo JP,Tokyo JP
国籍:JP,JP,JP,JP
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